000 00355nam a2200145Ia 4500
008 170101s2004 xx 000 0 und d
082 _a621.395
_bGHA
100 _aGhandhi, SK
245 0 _aVLSI Febrication Principles
260 _bJohn Wiley
_aNew York
_c2004
365 _eGIA
650 _aCircuitry
650 _aEngineering
942 _2ddc
_cBK
_02
999 _c103699
_d103699