| 000 | 00504nam a2200181Ia 4500 | ||
|---|---|---|---|
| 999 |
_c172299 _d172299 |
||
| 003 | OSt | ||
| 005 | 20210713123139.0 | ||
| 008 | 170101s2008 xx 000 0 und d | ||
| 082 |
_a620.5 _bTAN |
||
| 365 | _n686 | ||
| 100 | _aTaniguchi, Norio ( Ed.) | ||
| 245 | 0 | _aNanotechnology: Integrated Processing Systems for Ultra- Precision and Ultra- Fine Products | |
| 260 |
_bOxford _aNew Delhi _c2008 |
||
| 365 |
_eGIA _b295.00 _h0 |
||
| 650 | _aEngineering | ||
| 650 | _aNanotechnology | ||
| 942 |
_2ddc _cBK |
||